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May 10, 2024
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ENME 442 Micro-Electro-Mechanical SystemsCredit 3
This course offers basic integrated circuit manufacturing processes; electronics devices fundamentals; microelectromechanical systems fabrications including surface micromachining, bulk micromachining, and lithography; introduction to micro-actuators and microsensors such as micromotors, grippers, accelerometers and pressure sensors; physics of MEMS, scaling law, heat transfer, mechanics, electrostatics; introduction to micro- fluid systems; mechanical and electrical issues in micromachining; packaging techniques; and CAD tools to design microelectromechanical structures. Prerequisite(s): ENGE 380 .
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